EHT Semi integrates calibrated Bird probes into semiconductor RF power systems
EHT Semi has integrated Bird RF measurement technology into selected Orion Direct RF and tailored-waveform power systems for semiconductor manufacturing.
The embedded probe provides measurements of power, voltage, current and impedance, using NIST-traceable calibration. EHT says the arrangement establishes a common RF measurement reference from factory calibration and system validation through to operation in the fab.
The company reports power regulation within 2% of the set point through fast, dynamic load changes. It links that capability to the changing plasma loads encountered during semiconductor processing.
Integrating the measurement probe within the power platform allows equipment calibration and production monitoring to use the same reference. Customers will also have access to the probe data for diagnostics and process analysis.
